Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications / edited by Krishna Seshan.

Contributor Seshan, Krishna.

Edition Statement:2nd ed.

Imprint:Park Ridge, N.J. : Noyes Publications, 2002.

Descriptionxxviii, 629 p. : ill. ; 24 cm.

Bibliography Note:Includes bibliographical references and index.

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