JavaScript must be enabled on your browser for this PAC to work properly.
Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li.
Contributor
Li, Yuzhuo.
Imprint:
Hoboken, N.J. : John Wiley, 2007.
Description
xxv, 734 p. : ill. ; 24 cm.
Note:
"Wiley Interscience."
Bibliography Note:
Includes bibliographical references.
This item has been checked out 1 time(s)
and currently has 0 hold request(s).
Related Searches
Contributor
Li, Yuzhuo.
Subject:
Integrated circuits -- Design and construction.
Chemical mechanical planarization.
Microelectronics -- Materials.