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Glow discharge processes : sputtering and plasma etching / Brian Chapman.
Author:
Chapman, Brian N.
Imprint:
New York : Wiley, 1980.
Description
xv, 406 p. : ill. ; 24 cm.
Note:
"A Wiley-Interscience publication."
Note:
Includes index.
Bibliography Note:
Bibliography: p. 397-400.
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Author:
Chapman, Brian N.
Subject:
Sputtering (Physics)
Glow discharges.
Plasma etching.