JavaScript must be enabled on your browser for this PAC to work properly.
Handbook of sputter deposition technology : principles, technology, and applications / by Kiyotaka Wasa and Shigeru Hayakawa.
Author:
Wasa, Kiyotaka.
Edition Statement:
Reprint ed.
Imprint:
Westwood, N.J., U.S.A. : Noyes Publications, c1992 (2009 printing)
Description
xii, 304 p. : ill. ; 24 cm.
Bibliography Note:
Includes bibliographical references and index.
This item has been checked out 1 time(s)
and currently has 0 hold request(s).
Related Searches
Author:
Wasa, Kiyotaka.
Series Added Entry
Materials science and process technology series.
Subject:
Cathode sputtering (Plating process)
Thin films.
Contributor
Hayakawa, Shigeru, 1925-
