Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor.

Contributor Rai-Choudhury, P.

Imprint:Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, c1997.

Description2 v. : ill. ; 26 cm.

Note:v. 1. Microlithography -- v. 2. Micromachining and microfabrication.

Bibliography Note:Includes bibliographical references and indexes.

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