|
|
|
|
|
Leader |
LDR
|
|
cam4a 00 |
|
Control # |
1
|
|
2004050669 |
|
Control # Id |
3
|
|
DLC |
|
Date |
5
|
|
20190911110619.0 |
|
Fixed Data |
8
|
|
040514s2004 maua b 001 0 eng |
|
LC Card |
10
|
|
$a 2004050669 |
|
ISBN |
20
|
|
$a1580535909 (alk. paper) |
|
Obsolete |
39
|
|
$a227062$cTLC |
|
Cat. Source |
40
|
|
$aDLC$cDLC$dDLC |
|
Authen. Ctr. |
42
|
|
$apcc |
|
LC Call |
50
|
00 |
$aTK7875$b.M35 2004 |
|
Dewey Class |
82
|
00 |
$a621.381$222 |
|
ME:Pers Name |
100
|
1 |
$aMaluf, Nadim. |
|
Title |
245
|
10 |
$aIntroduction to microelectromechanical systems engineering /$cNadim Maluf, Kirt Williams. |
|
Edition |
250
|
|
$a2nd ed. |
|
Imprint |
260
|
|
$aBoston :$bArtech House,$c2004. |
|
Phys Descrpt |
300
|
|
$axx, 283 p. :$bill. ;$c26 cm. |
|
Series:Title |
440
|
0 |
$aMicroelectromechanical systems series |
|
Note:Bibliog |
504
|
|
$aIncludes bibliographical references and index. |
|
Subj:Topical |
650
|
0 |
$aMicroelectromechanical systems. |
|
AE:Pers Name |
700
|
1 |
$aWilliams, Kirt. |
