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Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.
Author:
Maluf, Nadim.
Edition Statement:
2nd ed.
Imprint:
Boston : Artech House, 2004.
Description
xx, 283 p. : ill. ; 26 cm.
Bibliography Note:
Includes bibliographical references and index.
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Author:
Maluf, Nadim.
Series Added Entry
Microelectromechanical systems series
Subject:
Microelectromechanical systems.
Contributor
Williams, Kirt.
